Reinraumtechnik Lanz´s offer
Following is an excerpt of some of equipment we now have available. Please keep in mind that equipment comes in and goes out practically daily. If you require any equipment which does not appear in our listing, please don´t hesitate to ask for it. We will be happy to send you a quotation with detailed information.
Balzers, Compact High Vacuum Coater BAK 760
Compact High Vacuum Coater - Various configurations possible.
Item-No.: 1.14
Balzers, Ultra-High Vacuum System UMS 500 P
Ultra-High Vacuum System - Various configurations possible.
Item-No.: 1.2
Balzers, Experimental High Vacuum Chamber
Balzers Experimental High Vacuum Chamber, Chamber Di=400 mm, De=450 mm, Height ca. 300 mm, with window D=100 mm
Item-No.: 1.23
Balzers, Sputter LLS 900
Sputtering System for RF and DC, automatic loading system, substrate heating in chamber and loadlock
Item-No.: 1.43
Balzers, Sputter LLS 900
Sputtering System for RF and DC, manual loading system, substrate heating in chamber and loadlock
Item-No.: 1.44
Balzers, Evaporation System BA 710
Compact Bell-Jar High Vacuum Coater
Item-No.: 1.46
Balzers, Sputter SCD 040
Balzers Union SCD 040 Sputter Coater
Item-No.: 1.48
Balzers, Compact Bell-Jar High Vacuum Coater BA 510
Item-No.: 1.54
Leybold, Sputter Clustertool Univex 450C
2 chamber system for RF- and DC-Sputtering, single wafer from cassette to cassette with roboter
Item-No.: 1.42
Leybold, Evaporator L560E
Evaporator - Various configurations possible
Item-No.: 1.52
Leybold-Heraeus, PD Evaporation System small
Item-No.: 1.55
Pink Vakuumtechnik, Sputtering System
"Sputtering System max. 3 targets, RF- and DC Sputtering, for foil with max. 12"" or substrates max. 12"" x 12"""
Item-No.: 1.37
RRTL, Evaporator LAK 300
The newly designed, versatile Reinraumtechnik Lanz LAK 300 is intended for various evaporation processes. The LAK 300 is a small and handy system, especially designed for laboratory and R&D use.
The system can be equipped with thermal evaporator, e-gun, glow discharge, substrate heaters, to name only a few possibilities.
Item-No.: 0.9
Vagatherm Anlagetech, Vakuum Coating System PVD 550 G 1233
Ideal system for diverse cleanroom applications. The system includes 4-pocket e-beam evaporator, sputtering source, substrate heating, rotary and cryo pump.
Item-No.: 1.39
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel.