Balzers/Pfeiffer, UHV Test Chamber TSU510
Including: Pfeiffer/Balzers Pumping Unit Control TCS 100 Pfeiffer/Balzers Power Supply TCP 310 Balzers Partial Pressure Gauge QMG 064 Balzers QME 064 Pfeiffer/Balzers DUO 030A Pump
Including: Pfeiffer/Balzers Pumping Unit Control TCS 100 Pfeiffer/Balzers Power Supply TCP 310 Balzers Partial Pressure Gauge QMG 064 Balzers QME 064 Pfeiffer/Balzers DUO 030A Pump
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel. 
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