Balzers, Sputter LLS 900
Sputtering System for RF and DC, automatic loading system, substrate heating in chamber and loadlock
Sputtering System for RF and DC, automatic loading system, substrate heating in chamber and loadlock
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel.
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