Fusion, Ozone Stabiliser M 150PC
Through UV Bake the substrate resist allows for increased consistency for further processes - Fully automatic - Cassette to cassette
Through UV Bake the substrate resist allows for increased consistency for further processes - Fully automatic - Cassette to cassette
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel. 
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