Reinraumtechnik Lanz´s offer
Following is an excerpt of some of equipment we now have available. Please keep in mind that equipment comes in and goes out practically daily. If you require any equipment which does not appear in our listing, please don´t hesitate to ask for it. We will be happy to send you a quotation with detailed information.
RRTL, High pressure cleaner SC-12
The newly designed, versatile Reinraumtechnik Lanz the SC-12 is intended for cleaning substrates / wafers via high pressure.
Various cleaning applications are possible for wafers/substrates, with a maximum size of 12”, via the built-in media and high pressure nozzles and DI-water heater.
Item no.: 0.11 Read full article
RRTL, Rinser/Dryer LRD
for wafers respectively masks up to 7"" with new controller STS-15-L
Item no.: 0.8 Read full article
RRTL, Evaporator LAK 300
The newly designed, versatile Reinraumtechnik Lanz LAK 300 is intended for various evaporation processes. The LAK 300 is a small and handy system, especially designed for laboratory and R&D use.
The system can be equipped with thermal evaporator, e-gun, glow discharge, substrate heaters, to name only a few possibilities.
Item no.: 0.9 Read full article
RRTL, Constant Power Supply CPS 350
Mercury Arc lamp power supply.
Power Supply for photolithography exposure systems, like aligners and flood exposures. The constant power supply CPS 350 is designed for operating the Mercury short arc lamps HBO 350 W/S and HBO 350 W.
Item no.: 0.10 Read full article
RRTL, Constant Power Supply CPS 200
Mercury Arc lamp power supply.
Power Supply for photolithography exposure systems, like aligners and flood exposures. The constant power supply CPS 350 is designed for operating the Mercury short arc lamps HBO 200 W/S and HBO 200 W.
Item no.: 0.12 Read full article
RRTL, Clustertool CT100 / CT150 / CT5060 / CT 105
Reinraumtechnik Lanz´s Cluster tool CT-100 is a modular Coater and/or Developer unit with one or two variable tracks.
This is a compact plant which can be configurated to customer´s needs.
The substrates are transported fully automatic by the handling system.
Item no.: 0.15 Read full article
RRTL, Substrat spiner EBS-8
The newly designed, versatile Reinraumtechnik Lanz spinner module with high torque 3-phase AC-motor and PWM servo controller. Depending upon the option selected, the spinner can be used for coating, developing or cleaning wafers and substrates. The optional built-in dispense arm allows for automated processing of single substrates.
Item no.: 0.2 Read full article
RRTL, Substrat spiner EBS-11
The popular Reinraumtechnik Lanz spinner with new electronics.This spinner is used for coating and developing ("puddle") of wafers and substrates. The optionalbuilt-in dispense arm allows for automated processing of single substrates, in conjunction with an optional dispense pump.
User-friendly operation via touch panel. The program holds 60 recipes with 30 user-determined process cycles.
Item no.: 0.7 Read full article
RRTL, Touch Screen TP-150
Touch screen 12 zoll for Karl Suss MA 150
Item no.: 0.13 Read full article
RRTL, Expander
Reinraumtechnik Lanz's ideal semi-automatic tool for expanding already processed die for easy and accurate pick and placement as well as LED etching process. The diced wafers are uniformly expanded to produce the required die interval which assists the pattern recognition system.
Item no.: 0.3 Read full article
RRTL, Vacuum Drying Oven VTO
Reinraumtechnik Lanz´s, brand new Vacuum Drying Oven, designed for drying substrates in vacuum and by increased temperature. During the drying process O2 and/or N2 can easily be added.
This oven is designed to be integrated in a cleanroom wall. Hence, the actual space needed in the cleanroom is minimal.
Item no.: 0.14 Read full article
RRTL, VPO 200 Vapor Prime Oven
Reinraumtechnik Lanz´s reliable, new HMDS Oven for pre-programmed dehydration and vapor deposition to generate photoresist adhesion. This newly developed vapor prime oven is controlled via a PLC with industrial PC and an easy-to-use touch panel.
Item no.: 0.17 Read full article
RRTL, HMDS-Oven VPO 50
Reinraumtechnik Lanz´s reliable, new HMDS Oven for pre-programmed dehydration and vapor deposition to generate photoresist adhesion. This newly developed vapor prime oven is controlled via a PLC with an easy-to-use touch panel.
Item no.: 0.5 Read full article
RRTL, Hotplate HP 200
The newly designed, versatile Reinraumtechnik Lanz Hotplate HP 200, selectively with temperature or process controller, is intended for various thermal processes, in detail for tempering and baking substrates of different sizes.
By using the process controller, the operator is able to implement a variety of temperature heating ramps.
Item no.: 0.6 Read full article
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel. 