Spare parts
Looking for spare parts for your semiconductor manufacturing equipment?
Reinraumtechnik Lanz has an extensive assortment of spare parts on stock for various equipment, i.e.:
- evaporation systems
- wafer saws
- wafer tracks
- plasma systems
- cleaners
Contact us today for a quotation.
Reinraumtechnik Lanz´s Cluster tool CT-100 is a modular Coater, Developer and/or Cleaner unit with one or two variable tracks. This is a compact plant which can be configurated to customer´s needs. Completely closed design with monitored transparent sliding doors ensures extra security. The substrates are transported fully automatic by the handling system.
The system is configurated for up to 150mm substrates – other sizes upon request.
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel. 