Evaporation spareparts
Varian |
Vacuum Ionisation Ga |
880 |
Einsch?beschrank |
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Varian |
VacIon Pump Control |
929-0062 |
220V,50Hz,10A |
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Varian |
VacIon Pump Control |
921-0062 |
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Varian |
VacIon Pump Control |
929.0062 |
(defekt-?) |
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Vacuum General |
AdapTorr |
AC-2 |
230V , 50-60Hz |
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Testo |
Testoterm |
0646 2532 |
Bedienungs-Hinweise
pic.Item_No: 187 |
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SPECS |
Ion Gun Power Supply |
10867911 |
|
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Schwab u. Klug |
Kanonepowersupply |
HAT-3 |
3x380/220V,50Hz
Eingangleistung max.4kVA |
|
Pfeiffer |
Power Supply |
TCP 270 |
715Hz,110/220/240V,
300W 40V-715Hz |
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Pfeiffer |
Vent Control |
TCF 101 |
115/220/240V,50-60Hz,40VA |
|
Oxford Applied Resea |
Atom Sources/RF Gas |
MPD 21 |
sehe Anlage |
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Newport |
Stromkonstantger |
4A |
Schrank |
|
MKS |
3 Chanel Selector |
274 |
|
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MKS |
Automatic Pressure C |
152D-P2 |
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MKS |
Power Supply |
PDR-C-2C |
mit Messzelle |
|
MKS |
Exhaus Valve Control |
252A-1 |
|
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Leybold- Heraeus |
Turbopumpe Steuerung |
NT 450 |
|
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KNIEL |
Netzteil |
KUI 32.2 |
Uin.:AC, 32V |
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Keithley- Instrument |
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INFICON |
Quarzhalter |
original verpakt |
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Hueting |
RF Generator |
TIS 0,5/13560 A 45-0 |
Netz: 3x380V, 50/60Hz, 1300VA, HF Leistung:500 W, Freq.: 13,56 MHz, Einschub 19" |
|
Fug |
Hochspannungs-Netzge |
HCN35M-6500 |
|
|
Fug |
Mittelspannungs-Netz |
MCN814-400 |
|
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Fug |
Niederspannungs-Netz |
NTN25M-5 |
|
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Elettrorava |
Turbocontroller |
ETC 450 |
1500VA |
|
Digital |
CompacTape |
TK50 |
20 St?ck |
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Balzers |
Automatic Pumping Un |
BSP 102K |
|
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Balzers |
BPU 101 |
BPU 101 |
19 zoll Einschub komplett mit KB 101 Keyboard, ohne PC 101 Vacuum,Baujahr 1990 |
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Balzers |
QSG 201D |
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Balzers |
Ionisation Gauge Con |
IMG 010 |
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Balzers |
Ionisation Gauge Con |
IMG 2 |
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Balzers |
Ionisation Gauge Con |
IMG 010 |
mit Geh?use |
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Balzers |
Automatic Pumping Un |
BSP 102 |
|
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Balzers |
Automatic Pumping Un |
BSP 102 |
nicht komplett |
|
Balzers |
Automatic Pumping Un |
BSP 102 |
nicht komplett |
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Balzers |
Optical Thin Film Mo |
GSM 210 |
|
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Balzers |
Start Unit |
ESU 104 |
|
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Balzers |
Start Unit |
ESU 104 |
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Balzers |
Evaporation Control |
BSV 601 |
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Balzers |
Partial Pressure Gau |
|
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Balzers |
Power Controller Q |
QCC 101 |
3st. |
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Balzers |
EC 201 |
EPS 101 / MC 101 / K |
fehlt ein Teil |
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Balzers |
Valve Control Unit |
RVG 030 |
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Balzers |
Electron Gun Control |
EKS 110 |
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Balzers |
Electron Gun Control |
EKS 110A |
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Balzers |
Ammeterdiff.-Pump |
EAD 101/ TI 101A |
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Balzers |
Valve Control Unit |
RVG 040 |
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Balzers |
Quadrupole Mass Spe |
QMG 420 |
|
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Balzers |
Function X / Rotary |
BFX 102/ BSD 102/ RV |
|
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Balzers |
Partial Pressure Gau |
QMG 064 |
|
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Balzers |
Electron Beam Power |
EHV 108A |
3x380/220V,50Hz
11kVA |
|
Balzers |
Pirani-Cold Cathode |
PKG 020 |
220V, 50-60Hz,45VA |
|
Balzers |
Pirani-Cold Cathode |
PKG 100 |
220V, 50-60Hz,40VA |
|
Balzers |
Pirani-Cold Cathode |
PKG 100 |
220V, 50-60Hz,50VA |
|
Balzers |
Valve Control Unit |
RVG 040 |
220V,50Hz |
|
Balzers |
High Vacuum Relay |
IKW 010 |
220V,50-60Hz,
30VA |
|
Balzers |
Feeder Control |
BSF 201 |
24V,50Hz |
|
Balzers |
Vacuum Controller |
VWS 120 |
220V,50-60Hz,
20VA |
|
Balzers |
Timer |
ETI 101 |
220V,50HZ,10VA |
|
Balzers |
Nitrogen Level Contr |
NLC 102B |
|
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Balzers |
Rotary Cage Control |
BSD 201 A |
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Balzers |
Glow Disharge Contro |
BSG 103 |
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Balzers |
Test Change Control |
BST 102 |
|
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Balzers |
Steuerrechner |
Digital MicroVAX 310 |
mit Steuerung BPU 431B,Version:004 R05 |
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Balzers |
Tape Subsystem |
ESS 111 |
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Balzers |
Power Controller |
|
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Balzers |
Remote Control |
EFS 110 |
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Balzers |
Remote Control |
EFS 110 |
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Balzers |
TPG 031 |
|
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Balzers |
Remote Control |
EFS 110 |
|
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Balzers |
Valve Control Unit |
RVG 040 |
220V,50Hz |
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Balzers |
Meissner Trap Contro |
BSM 104 |
original verpakt |
|
Balzers |
Digital I/O Testprin |
DT 020 |
original verpakt |
|
Balzers |
QM 101 |
P.C.B.:S/Nr.BG525637GS
Art.Nr.:BG531101DT |
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Balzers |
Quarz Change Control |
QCC 101 / QSG 301 |
|
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Balzers |
Feeder Control |
BSF 201 |
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Balzers |
Steurung |
|
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Balzers |
Valve Control Unit |
RVG 040 |
220V,50-60Hz, 10VA |
|
Balzers |
Einsch?beschrank |
AC400 |
bxtxh=555x690x1850
Power Controller 5x,
Power Supply,Temp.Contr. |
|
Balzers |
Hochspannungstrafo |
EVU 104-U2 |
220V,50-60Hz,5kVA |
|
Balzers |
Hochspannungstrafo |
HGG 800 |
max.240V,48/62Hz,800VA |
|
Balzers |
Hochspannungstrafo |
HGG 800 |
max.240V,800VA |
|
Balzers |
Pirani-Cold Cathode |
PKG 010 |
230V,50-60Hz |
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Balzers |
MC 101 |
|
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Balzers |
KB 101 |
|
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Balzers |
Ionization Gauge Con |
IMG 010 |
220V,50-60,85VA |
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Balzers |
Temperaturregelger |
f?r Aufdamfanlage |
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Balzers |
Indexer-Control |
BID 101 |
220V, 50Hz, 35VA |
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Balzers |
QME 064 |
QME 064 |
|
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Balzers |
Log. Lin. Ion Gauge |
IMG 060 |
220V, 50-60Hz, 70Va |
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Balzers |
Flansch |
CF 100 / 35 |
NEU
Art.No.: BP 414 457 R |
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Assembly |
Helium Charge Adapte |
|
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Alcatel- Annency |
Guardian 1 |
8259 |
|
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Alcatel |
CFV 900 Turbo |
8288 |
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Alcatel |
API 122 86454 |
|
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Alcatel |
API 120 5945 |
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Alcatel |
ACF 101 86457 |
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Vakuum Messzellen |
sehe Liste |
|||
Ventile |
sehe Liste |
|||
Vakuum Ventile handb |
sehe Liste |
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Druckschalter |
sehe Liste |
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Mass Flow Controller |
sehe Liste |
|||
Lampe mit Durchf?hru |
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Quarz Crystal Thin F |
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Messr?hre |
QME 064 |
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Optische Schichdicke |
WLE 201. |
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Optische Schichdicke |
WLE 201. |
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Optische Schichdicke |
WLE 201. |
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Optische Schichdicke |
WLL 201. |
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Optische Schichdicke |
WLE 201. |
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Optische Schichdicke |
WLL 201. |
|
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K?hlpl.Indir. |
KI 517. |
5x17,5zoll
Art.Nr. BK 205 297-T |
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K?hlpl.Indir. |
KI 517. |
5x17,5zoll
Art.Nr. BK 205 297-T |
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Schwingquarz Schich |
|
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Katalisator Falle |
URB 025 |
Mit:1.Heizpatrone
d=18x6050W,220V
2.Katalisator
BP224695-T |
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6-Fach Quarz Wechsle |
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Vacuum Messzellen |
sehe Liste |
|||
Ventile |
sehe Liste |
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HS-Durchf?hrung |
EHD 110A |
|
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Kanone Ersatzteile |
sehe Liste |
|||
SVV 035PF |
F-23856-01
220V,50Hz |
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BKM 01006 |
mit HPA311,BKM04751,
220V,50Hz |
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Quarz Schichtdickenm |
BAK 550 |
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6-Fach Quarz Wechsle |
0486 BGG10250 |
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Entladungs Stab |
Tension 20kV max |
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Kalottenhalter |
BAK 550 SCFR |
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Me?zelle |
QME 111 |
Quadrapol-? |
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Strahler |
13169X |
110V,500W
Strahler f?r AsiNr.2, 2 St.
Art.Nr. B5170111RA |
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Wendekalotte Antrieb |
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Kalotten |
BAK 760
d=70mm , 15 St. |
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Kalotten |
Au?en=330,Innen140,6St.
Au?en=260,Innen=95:4St. |
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Kalotten |
d=78mm,f?r 16 Wafer
8 St. |
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Kalotten |
div.
15 St. |
|||
d=360
Substrat=5x5mm , 12St. |
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Planetten |
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Planettengetriebe |
mit Wendekalotten
d=460, h=420,
Substrat=3zoll, 3x8 Wafer |
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Wendekalotte |
d=660,Substrat=3zoll |
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Planettengetriebe |
mit Motor.Flantsch
DI250 ISO |
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Substrathalter |
d=93mm , 17St.
d=65mm , 14St. |
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MPS 110 |
3x380/220V,50-60Hz,
20,4kVA (IXYS) |
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HV-Generator |
EHS 110 |
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HF-Generator(?) |
RFL 102 |
50-60Hz, 3x380V |
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Penningvac |
PM 410 |
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Penningvac |
PM 410 |
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Ionivac |
IM110 |
defekt-? |
||
Turbopumpe Steuerung |
NT 450 |
|
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Ionivac Thermovac Th |
IM 110 TM 210S TM 11 |
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Steuerung f?r Turbop |
NT 220 |
|
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Ionivac |
IM 210 |
|
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Inficon |
XTC |
751-001-G1 |
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Ionivac |
IM 210 |
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Ionivac |
IM 210 |
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Thermovac |
TM 230 |
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Thermovac |
TM 220 S2 |
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Membranovac |
MV 110 S2 |
15801 |
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Combitron |
CM 351 |
mit Vakuumsensoren :
16094,16094
Kat.Nr.15755 |
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Piezovac |
PV 111 |
Kat.Nr. 16093
100...240V,10VA,50-60Hz |
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Remote Indicator Sys |
RIS |
Kat.Nr. 18896 |
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Ionivac |
IM21 |
|
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Ionivac |
IM210 |
|
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Ionivac |
IM210 |
|
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Turbotronic |
NT 450 |
|
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Thermovac Penningvac |
TM 220S2 PM 411 S2 |
|
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Thermovac Penningvac |
TM 220S2 PM 411 S2 |
|
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ME 03 ATP 01 ME 03 A |
|
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Ionivac |
IM 220 |
mit Me?zelle
Kat.Nr. 15816 |
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Combitron |
CM 330 |
Kat.Nr. 16276 |
||
Combitron / Turbotro |
CM 330 / NT 50 / RVG |
|
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Pilzovac |
PV 111 |
Kat.Nr. 16093 |
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Thermotron |
TM 14/2 |
(bar) |
||
Thermovac |
TM 201 |
Kat.Nr. 16251 |
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Thermotron |
TM 13/1 |
Kat.Nr. 16212 |
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Combivac Vakuummessg |
CM31 |
mit Messzelle TR 206 |
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Ventile |
sehe Liste |
|||
Ventile |
sehe Liste |
|||
Gas Analysis System |
Inficon , Transpect |
original verpakt |
||
Gas Analysis System |
Inficon , Transpect |
original verpakt |
||
Rezipient mit Turbop |
PT-350/20 |
Kat.Nr. 01252V1
|
Reinraumtechnik
Lanz´s reliable, new HMDS Oven for pre-programmed dehydration
and vapor deposition to generate photoresist adhesion. This newly
developed vapor prime oven is controlled via a PLC with an easy-to-use
touch panel.